JPH03123573U - - Google Patents
Info
- Publication number
- JPH03123573U JPH03123573U JP3140090U JP3140090U JPH03123573U JP H03123573 U JPH03123573 U JP H03123573U JP 3140090 U JP3140090 U JP 3140090U JP 3140090 U JP3140090 U JP 3140090U JP H03123573 U JPH03123573 U JP H03123573U
- Authority
- JP
- Japan
- Prior art keywords
- coated
- coating liquid
- coating
- chuck
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000002950 deficient Effects 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3140090U JPH03123573U (en]) | 1990-03-27 | 1990-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3140090U JPH03123573U (en]) | 1990-03-27 | 1990-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03123573U true JPH03123573U (en]) | 1991-12-16 |
Family
ID=31534154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3140090U Pending JPH03123573U (en]) | 1990-03-27 | 1990-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03123573U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024116880A1 (ja) * | 2022-11-29 | 2024-06-06 | 東京エレクトロン株式会社 | スピンチャック及び塗布処理装置 |
-
1990
- 1990-03-27 JP JP3140090U patent/JPH03123573U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024116880A1 (ja) * | 2022-11-29 | 2024-06-06 | 東京エレクトロン株式会社 | スピンチャック及び塗布処理装置 |
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